


| パラメータ | 価値 |
|---|---|
| アイテム | Specifications |
| 重さ | 410 g approx. |
| 詳細 | Atmospheric side and vacuum side are isolated. |
| 漏れ | 1.0 x 10-10Pa·m3/s [He] or less (* Measured with a He detector) |
| 製品 | Vacuum-resistant flange 4CH |
| 材料 | Main unit: Stainless steel (SUS303), Holding bracket: Stainless steel (SUS301),Fiber: Quartz glass, O-ring: Fluororubber |
| Oリングサイズ | V40 |
| 部品番号 | FV-FR4 |
| 製品名 | One-Touch Connection System Vacuum-resistant Fibers |
| 製品番号 | FV-FR4 |
| 周囲の湿度 | 35 to 85% RH (Same for storage) |
| 抗張力 | 20 N or less (Atmospheric / vacuum side fiber joint) |
| 適用可能な繊維 | FT-40V, FD-KZ50V, FD-L10V, FT-J9 |
| 締め付けトルク | 9.8 N·m or less (M8 screw) |
| 周囲温度 | -30 to +120℃-22 to +248℉(Same for storage. Up to +40 ℃+104℉when humidity is high. However, no dew condensation or icing allowed.) |
| 真空チャンバー壁の推奨厚さ | 3.0 mm0.118 inor more(Note) : If the vacuum chamber wall is too thick, the FV-FR4 may not be able to connect to the vacuum side fiber. In that case, connect the FV-FR4 to the vacuum side fiber before the installation. |
技術仕様と性能データ
設置・操作ガイド